Microelectronic Engineering

Aims & Scope

Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment.

It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems.

Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.

View Aims & Scope

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Metrics & Ranking

Impact Factor

Year	Value
2025	3.1

SJR (SCImago Journal Rank)

Year	Value
2024	0.539

Quartile

Year	Value
2024	Q2

h-index

Year	Value
2024	115

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Abstracting & Indexing

Journal is indexed in leading academic databases, ensuring global visibility and accessibility of our peer-reviewed research.

• Scopus
• Google Scholar
• Web of Science

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Subjects & Keywords

Journal’s research areas, covering key disciplines and specialized sub-topics in Engineering, Materials Science and Physics and Astronomy, designed to support cutting-edge academic discovery.

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Most Cited Articles

The Most Cited Articles section features the journal's most impactful research, based on citation counts. These articles have been referenced frequently by other researchers, indicating their significant contribution to their respective fields.

• Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

  Citation: 906

  Authors: E.W., W., P., A., D.

• Nanofabrication by electron beam lithography and its applications: A review

  Citation: 716

  Authors: Yifang

• Carbon nanotubes in interconnect applications

  Citation: 515

  Authors: F, A.P, G.S, W, M, E, W

• Emerging trends in wide band gap semiconductors (SiC and GaN) technology for power devices

  Citation: 487

  Authors: Fabrizio, Patrick, Giuseppe, Raffaella, Filippo, Ferdinando, Mario

• Point-of-care testing (POCT) diagnostic systems using microfluidic lab-on-a-chip technologies

  Citation: 465

  Authors: Wooseok, Jungyoup, Jin-Woo, Chong H.

• PDMS-based microfluidic devices for biomedical applications

  Citation: 420

  Authors: Teruo

• Lab-on-a-chip devices: How to close and plug the lab?

  Citation: 412

  Authors: Yuksel, Robert D., Govind V., Emmanuel

• Towards implementation of a nickel silicide process for CMOS technologies

  Citation: 383

  Authors: C., F.M., C., C.

• Optimization of poly-di-methyl-siloxane (PDMS) substrates for studying cellular adhesion and motility

  Citation: 365

  Authors: D., T., S., P., P.

• Measurement of nonlinear mechanical properties of PDMS elastomer

  Citation: 355

  Authors: Tae Kyung, Jeong Koo, Ok Chan

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