Materials Science in Semiconductor Processing
Published by Elsevier
ISSN : 1369-8001
Abbreviation : Mater. Sci. Semicond. Process.
Aims & Scope
Materials Science in Semiconductor Processing provides a unique forum for the discussion of novel processing, applications and theoretical studies of functional materials and devices for (opto)electronics, sensors, detectors, biotechnology and green energy.
Each issue will aim to provide a snapshot of current insights, new achievements, breakthroughs and future trends in such diverse fields as microelectronics, energy conversion and storage, communications, biotechnology, (photo)catalysis, nano- and thin-film technology, hybrid and composite materials, chemical processing, vapor-phase deposition, device fabrication, and modelling, which are the backbone of advanced semiconductor processing and applications.
Coverage will include: advanced lithography for submicron devices; etching and related topics; ion implantation; damage evolution and related issues; plasma and thermal CVD; rapid thermal processing; advanced metallization and interconnect schemes; thin dielectric layers, oxidation; sol-gel processing; chemical bath and (electro)chemical deposition; compound semiconductor processing; new non-oxide materials and their applications; (macro)molecular and hybrid materials; molecular dynamics, ab-initio methods, Monte Carlo, etc.; new materials and processes for discrete and integrated circuits; magnetic materials and spintronics; heterostructures and quantum devices; engineering of the electrical and optical properties of semiconductors; crystal growth mechanisms; reliability, defect density, intrinsic impurities and defects.
View Aims & ScopeMetrics & Ranking
Impact Factor
| Year | Value |
|---|---|
| 2025 | 4.6 |
SJR (SCImago Journal Rank)
| Year | Value |
|---|---|
| 2024 | 0.785 |
Quartile
| Year | Value |
|---|---|
| 2024 | Q1 |
h-index
| Year | Value |
|---|---|
| 2024 | 95 |
Journal Rank
| Year | Value |
|---|---|
| 2024 | 6955 |
Journal Citation Indicator
| Year | Value |
|---|---|
| 2024 | 10053 |
Impact Factor Trend
Abstracting & Indexing
Journal is indexed in leading academic databases, ensuring global visibility and accessibility of our peer-reviewed research.
Subjects & Keywords
Journal’s research areas, covering key disciplines and specialized sub-topics in Engineering, Materials Science and Physics and Astronomy, designed to support cutting-edge academic discovery.