Chemical Vapor Deposition

Aims & Scope

From 2016, the journal Chemical Vapor Deposition will be published as a section of the journal Advanced Materials Interfaces.

Chemical Vapor Deposition (CVD) publishes Reviews, Short Communications, and Full Papers on all aspects of chemical vapor deposition and related technologies, along with other articles presenting opinion, news, conference information, and book reviews.

Abstracting & Indexing

Journal is indexed in leading academic databases, ensuring global visibility and accessibility of our peer-reviewed research.

• Scopus
• Google Scholar

Subjects & Keywords

Journal’s research areas, covering key disciplines and specialized sub-topics in Chemical Engineering, Chemistry and Physics and Astronomy, designed to support cutting-edge academic discovery.

Most Cited Articles

The Most Cited Articles section features the journal's most impactful research, based on citation counts. These articles have been referenced frequently by other researchers, indicating their significant contribution to their respective fields.

• Review of <scp>CVD</scp> Synthesis of Graphene

  Citation: 555

  Authors: Roberto, Cristina

• A Kinetic Model for Step Coverage by Atomic Layer Deposition in Narrow Holes or Trenches

  Citation: 346

  Authors: R.G., D., E., J.

• The CVD of Nanodiamond Materials

  Citation: 314

  Authors: James E., Anirudha V.

• Ruthenium Thin Films Grown by Atomic Layer Deposition

  Citation: 250

  Authors: T., P., M., M.

• Perfectly Conformal TiN and Al2O3 Films Deposited by Atomic Layer Deposition

  Citation: 250

  Authors: Mikko, Markku, Jan-Pieter, Cees, Pekka J., Jarmo

• Processing and Applications of Aerosol‐Assisted Chemical Vapor Deposition

  Citation: 211

  Authors: X., K.‐L.

• Large‐Scale Synthesis of Few‐Layered Graphene using CVD

  Citation: 210

  Authors: Xianbao, Haijun, Fangming, Mingjian, Li, Shaoqing, Qin, Yang, Rong, Ziyong, Dong, Jing

• CVD Growth of MoS₂‐based Two‐dimensional Materials

  Citation: 205

  Authors: H. F., S. L., D. Z.

• Atomic Layer Deposition of Photocatalytic TiO₂ Thin Films from Titanium Tetramethoxide and Water

  Citation: 203

  Authors: V., A., M., M., T., J.

• A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy

  Citation: 197

  Authors: Riikka L.